China can leverage domestically developed semiconductor manufacturing tools to circumvent U.S. restrictions on access to advanced chipmaking technology, according to an executive from a leading Chinese equipment supplier.
Speaking on Thursday at the SEMICON China industry fair in Shanghai, Du Lijun, president of Shenzhen SiCarrier Industry Machines, acknowledged the constraints imposed by export controls on high-end lithography systems. However, he asserted that Chinese-made tools could facilitate the production of 5-nanometer chips, a crucial step in advancing the country’s semiconductor capabilities.
“There may be a path where we can bypass optical lithography by employing our process equipment to address certain lithography challenges,” Du stated during the event, which commenced on Wednesday and features around 1,400 exhibitors.
Making its debut at the exhibition, SiCarrier showcased a range of etching and deposition process equipment, as well as optical metrology and inspection tools. Its booth attracted significant attention, underscoring growing interest in China’s efforts to develop indigenous semiconductor technology.
Despite the potential of domestic alternatives, Du cautioned that multi-patterning techniques, which involve additional manufacturing steps, could impact production efficiency. Advancing from 7-nm to 5-nm technology could increase processing steps by approximately 20%, potentially affecting yields, he noted.
A company manager, speaking on condition of anonymity, revealed that SiCarrier’s tools are already in use by major Chinese chipmakers, including Semiconductor Manufacturing International Corporation (SMIC). SMIC, a key player in China’s semiconductor industry, did not immediately respond to a request for comment on Thursday.
Additionally, SiCarrier collaborates with telecommunications giant Huawei, according to a Bloomberg News report.
Founded in 2022, SiCarrier Industry Machines operates under its parent company, SiCarrier Technology, which was established in 2021. Corporate records indicate that the firm is wholly owned by a state-backed investment fund in Shenzhen, China’s southern technology hub.
SiCarrier was among 140 Chinese semiconductor-related firms added to a U.S. trade blacklist in December 2024, reflecting heightened tensions over Beijing’s technological advancements.
One of the company’s key innovations is its multi-patterning technology, an alternative to extreme ultraviolet (EUV) lithography tools manufactured by Dutch firm ASML. Multi-patterning relies on etching and deposition techniques instead of optical lithography, offering a pathway for China to produce 5-nm chips despite lacking access to EUV technology.
SiCarrier secured a Chinese patent for its multi-patterning technology in late 2023. According to its patent filing, the technology employs deep ultraviolet (DUV) lithography and self-aligned quadruple patterning to meet critical 5-nm production thresholds. The approach not only circumvents the need for EUV machines but also reduces manufacturing costs, the company stated.
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